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解決方案

創新的微泡清洗、超臨界清洗、中空纖維過濾、光觸媒尾氣處理等多項技術系統,適用於全方位機台。

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SUSTAINABILITY

永續發展

永續發展

以「Clean Technology」為核心,結合環保、節能與再生技術,打造潔淨製程的新標準。

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ABOUT

關於衍立光

專注於半導體清洗、過濾與尾氣處理解決方案

衍立光股份有限公司成立於 2024 年,專注於半導體清洗、過濾與尾氣處理解決方案。以「Clean Technology」為核心,結合環保、節能與再生技術,打造潔淨製程的新標準。
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關於衍立光
PORDUCTS

主要產品

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SWCNT × Polymer Platform -Advanced Functional Polymer Solutions for Semiconductor Applications
Engineered integration of Single-Walled Carbon Nanotubes (SWCNT) into high-performance polymers to create next-generation materials for semiconductor contamination control, chemical delivery systems, and advanced manufacturing environments.
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EMI Elimination System Precision Electromagnetic Interference Control for Advanced Manufacturing
Advanced EMI mitigation solutions designed to reduce electromagnetic interference, static accumulation, and signal instability in semiconductor and high-precision manufacturing environments.
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Microbubble Cleaning Platform- Advanced Contamination Control for Semiconductor Applications
Utilizing controlled microbubble dynamics to enhance particle detachment, surface cleaning efficiency, and chemical reduction in semiconductor processes.
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Supercritical CO₂ Filter Regeneration Technology -Advanced Filter Recovery & Ultra-Low Contamination Cleaning Platform
Utilizing supercritical CO₂ (SC-CO₂) to regenerate semiconductor-grade filter elements by removing organic residues, adsorbed contaminants, and trace impurities — while preserving membrane integrity and performance.
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Photocatalyst Vent / Waste Gas Treatment System- Advanced Oxidative Decomposition for Cleanroom & Process Exhaust Control
Photocatalytic Gas Treatment Technology

Efficient Decomposition of VOCs, AMC, and Hazardous Process Gases

Engineered photocatalyst-based vent treatment systems designed to decompose volatile organic compounds (VOCs), airborne molecular contaminants (AMC), and trace process gases in semiconductor manufacturing environments.

Delivering cleaner exhaust, improved corrosion control, and enhanced environmental compliance.
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最新消息

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Focused on Semiconductor Cleaning, Filtration & Exhaust Treatment Solutions
We specialize in advanced contamination control technologies for semiconductor manufacturing, delivering integrated solutions in precision cleaning, high-purity filtration, and exhaust gas treatment.

Designed for increasingly sensitive advanced process nodes, our systems help minimize particulate, molecular, and chemical contamination while ensuring stable, repeatable, and reliable production performance.
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