Technology Principle
Supercritical CO₂ is achieved when CO₂ is above its critical temperature (31.1°C) and critical pressure (7.38 MPa).
In this state, CO₂ exhibits:
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Gas-like diffusivity
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Liquid-like solvating power
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Extremely low surface tension
This unique combination enables deep penetration into filter pores and microstructures, dissolving and extracting:
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Organic residues
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Adsorbed molecular contaminants
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Hydrocarbon fragments
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Process-related byproducts
Without leaving secondary contamination.
SC-CO₂ FOR REGENERATION FILTER
Traditional regeneration methods (water flush / solvent clean / thermal bake) may:
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Leave solvent residue
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Cause membrane swelling
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Damage pore structure
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Increase extractables
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Shorten filter life
SC-CO₂ regeneration offers:
✓ Deep pore penetration
✓ No drying marks
✓ No capillary stress damage
✓ Reduced chemical consumption
✓ Controlled extraction environment
Applicable Filter Types
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PTFE membrane filters
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PVDF filter elements
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PES / PSU liquid filters
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Polymer-based gas filters
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AMC-related adsorption structures
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Select specialty composite media
(Compatibility validation recommended prior to implementation)
Regeneration Mechanisms
1. Solvation Extraction
SC-CO₂ dissolves non-polar and semi-polar organic contaminants.
2. Pore Penetration
Low surface tension allows penetration into micro-scale pore networks.
3. Pressure Modulation Extraction
Controlled depressurization enhances contaminant release.
4. Optional Co-Solvent Mode
Small percentage of modifier (if required) increases polarity range.
Semiconductor Applications
▸ Liquid Chemical Filters
IPA / Acid process filters
▸ UPW System Filters
▸ Gas Line Pre-Filters
▸ FOUP Vent Filters
▸ Specialty Process Filtration Modules
Advantages
Environmental
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Reduced solvent waste
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Low VOC emission
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CO₂ recyclable
Engineering
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Non-destructive regeneration
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Extended filter lifecycle
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Lower total cost of ownership
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Controlled extraction selectivity
Contamination Control
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No water residue
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No drying stains
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No re-adsorption of dissolved contaminants